The NVM Controller cache reduces the device power consumption and improves system performance when wait states are required. Only the Flash area is cached (Data Flash is not). It is a direct-mapped cache that implements 64 lines of 64 bits (that is, 512 Bytes). NVM Controller cache can be enabled by writing a '0' to the Cache Disable bit in the Control B register (CTRLB.CACHEDIS).

The cache can be configured to three different modes using the Read Mode bit group in the Control B register (CTRLB.READMODE).

The INVALL command can be issued using the Command bits in the Control A register to invalidate all cache lines (CTRLA.CMD=INVALL). Commands affecting NVM content automatically invalidate cache lines.