| Device Family | Maximum Self-Capacitance Sensor Capacitance [pF] | Maximum Mutual Capacitance Sensor Capacitance [pF] |
|---|---|---|
| ATtiny81X/161X/321X | 53 | 32 |
| ATmega324PB/ATmega328PB | 32 | 32 |
| ATSAML10/L11 | 63 | 32 |
| ATSAML22 | 32 | 32 |
| ATSAMC20/C21 | 32 | 32 |
| ATSAMD10/D11 | 32 | 32 |
| ATSAMD20/D21/DA1/ATSAMHA1 | 32 | 32 |
| ATSAML21 | 32 | 32 |
| ATSAMD51/ATSAME51/ATSAME53/ATSAME54 | 63 | 32 |