| Pins | 8 | 14 | 8 | 14 | 20 |
| SRAM | 128B | 128B | 256B | 256B | 256B |
| Flash | 2 KB | 2 KB | 4 KB | 4 KB | 4 KB |
| EEPROM | 64B | 64B | 128B | 128B | 128B |
| Max. frequency (MHz) | 20 | 20 | 20 | 20 | 20 |
| 16-bit Timer/Counter type A (TCA) | 1 | 1 | 1 | 1 | 1 |
| 16-bit Timer/Counter type B (TCB) | 1 | 1 | 1 | 1 | 1 |
| 12-bit Timer/Counter type D (TCD) | 1 | 1 | 1 | 1 | 1 |
| Real-Time Counter (RTC) | 1 | 1 | 1 | 1 | 1 |
| USART | 1 | 1 | 1 | 1 | 1 |
| SPI | 1 | 1 | 1 | 1 | 1 |
| TWI (I2C) | 1 | 1 | 1 | 1 | 1 |
| ADC | 1 | 1 | 1 | 1 | 1 |
| ADC channels | 6 | 10 | 6 | 10 | 12 |
| DAC | 1 | 1 | 1 | 1 | 1 |
| AC | 1 | 1 | 1 | 1 | 1 |
| AC inputs | 1p/1n | 1p/1n | 1p/1n | 1p/1n | 2p/2n |
| Peripheral Touch Controller (PTC) | No | No | No | No | No |
| Configurable Custom Logic | 1 | 1 | 1 | 1 | 1 |
| Window Watchdog | 1 | 1 | 1 | 1 | 1 |
| Event System channels | 6 | 6 | 6 | 6 | 6 |
| General purpose I/O | 6 | 12 | 6 | 12 | 18 |
| External interrupts | 6 | 12 | 6 | 12 | 18 |
| CRCSCAN | 1 | 1 | 1 | 1 | 1 |
