| Maximum CPU frequency | 48 MHz |
| Memory Protection Unit | 8 regions |
| Systick timer | 1 |
| Serial Wire Debug Interface | Yes |
| Oscillators | 32.768 kHz crystal oscillator (XOSC32K) |
| 0.4-32 MHz crystal oscillator (XOSC) |
| 32.768 kHz internal oscillator (OSC32K) |
| 32.768 kHz ultra low-power internal oscillator (OSCULP32K) |
| 48 MHz high-accuracy internal oscillator (OSC48M) |
| 96 MHz Fractional Digital Phased Locked Loop (FDPLL96M) |
| Generic Clock (GCLK) | 9 |
| DMA channels | 12 |
| Event System channels | 12 |
| External Interrupt lines | 16 + 1 non-maskable |
| Divide and Square Root Accelerator (DIVAS) | Yes |
| Waveform outputs/Capture inputs channels per TC instance | 2 |
| TC Maximum and Minimum Capture | Yes |
| Timer Counter for Control (TCC) instances | 3 |
| Waveform output channels per TCC | 8 for TCC0, 4 for TCC1, 2 for TCC2 |
| Configurable Custom Logic (CCL) (number of LUTs) | 4 |
| Analog-to-Digital Converter (ADC) instances | 2 |
| Sigma-Delta Analog-to-Digital Converter (SDADC) instances | 1 |
| Analog Comparators (AC) | 1 AC made of 2 Comparators |
| Digital-to-Analog Converter (DAC) channels | 1 |
| Real-Time Counter (RTC) | Yes |
| RTC alarms | 1 |
| RTC compare values | One 32-bit value or two 16-bit values |
| Frequency Meter (FREQM) reference clock divider | Yes |
| Watchdog Timer (WDT) | Yes |
| Position Decoder (PDEC) | Yes |
| Memories CRC32 computation (DSU) | Yes (SRAM, Flash, Data Flash) |
| Brown-out Detection (BOD) | VDD, VDDCORE |